HOME Gallery: Semiconductor- and Solid State Physics
Germanium on Si dioxide


TEM images of annealed Si wires that were in situ covered with Ge.
(a) The darker part indicate areas, where holes in the oxide layer have formed and the deposited Ge is polycristalline.
(b) High resolution TEM image: The holes in the SiO2 are decorated with polycristalline Ge (p-Ge), which appears darker than the amorphous Ge (a-Ge).
  • "Transient-enhanced Si diffusion on native-oxide-covered Si(001) nanostructure s during vacuum annealing"
    H. Lichtenberger, M. Mühlberger, F. Schäffler
    Appl. Phys. Lett. 82 (21) 3650 (2003)