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Cross sectional TEM 1


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Cross sectional TEM image of a Si wird. The structure was produced using reactive ion e tching.
... Herbert Lichtenberger


  • "Transient-enhanced Si diffusion on native-oxide-covered Si(001) nanostructures during vacuum annealing"
    H. Lichtenberger, M. Mühlberger, F. Schäffler
    Appl. Phys. Lett. 82 (21) 3650 (2003)
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last modified Thu Jun 1 10:40:39 CEST 2006